Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409404 | Scrubber system and wet cleaning method using the same | Suji Gim, Heesub Kim, Hee Ock Park, Jongyong Bae, Sung Chul Yoon +3 more | 2025-09-09 |
| 12290778 | Scrubber, ALD process system including the scrubber and method for fabricating semiconductor device using the scrubber | Seo Young Maeng, Il Jun Jeon, Su Ji GIM, Jin Hong Kim, Jong Yong Bae +1 more | 2025-05-06 |
| 11931683 | Scrubber system and wet cleaning method using the same | Suji Gim, Heesub Kim, Hee Ock Park, Jongyong Bae, Sung Chul Yoon +3 more | 2024-03-19 |
| 9592473 | Separation and recycling system of perfluorinated compounds | — | 2017-03-14 |
| 7040336 | Gas delivery system for supplying gas to semiconductor manufacturing equipment | Yu-kweon Kim, Seung-Ki Chae, Jai-Kang Jeon, Yong-Wook Lee | 2006-05-09 |