| 12405227 |
Method for region of interest processing for reticle particle detection |
Peter Kochersperger, Christopher Michael DOHAN, Justin Kreuzer, Michal Emanuel Pawlowski, Aage Bendiksen +3 more |
2025-09-02 |
| 12189312 |
Reticle gripper damper and isolation system for lithographic apparatuses |
Peter Kochersperger, Boris Kogan, Martinus Agnes Willem Cuijpers, Robert Wade, Shaun Evans |
2025-01-07 |
| 9136751 |
Linear motor magnetic shield apparatus for lithographic systems |
Kalyan Kumar MANKALA, Pradeep K. Govil, Andrew Michael Nelson |
2015-09-15 |
| 9130443 |
Linear motor magnetic shield apparatus |
Kalyan Kumar MANKALA, Pradeep K. Govil, Andrew Michael Nelson |
2015-09-08 |
| 9075324 |
Beam positioning and pointing |
Richard Carl Zimmerman |
2015-07-07 |
| 8982317 |
Cooling of actuator coils |
Pradeep K. Govil, Michael Emerson Brown |
2015-03-17 |
| 8392003 |
Pre-filter for a servo control loop, and applications thereof |
— |
2013-03-05 |
| 8013979 |
Illumination system with low telecentricity error and dynamic telecentricity correction |
Lev Ryzhikov, James Tsacoyeanes, Scott Coston |
2011-09-06 |
| 7999939 |
Real time telecentricity measurement |
Peter Kochersperger |
2011-08-16 |
| 7894140 |
Compensation techniques for fluid and magnetic bearings |
Santiago del Puerto |
2011-02-22 |
| 7545585 |
Uniformity correction system having light leak and shadow compensation |
— |
2009-06-09 |
| 7525641 |
System and method for uniformity correction |
Richard Carl Zimmerman, Eric Brian Catey, David A. Hult, Alexander Kremer, Heine Melle Mulder +1 more |
2009-04-28 |
| 7333176 |
De-focus uniformity correction |
Alexander Kremer, Elizabeth Stone, Richard Carl Zimmerman |
2008-02-19 |
| 7173688 |
Method for calculating an intensity integral for use in lithography systems |
Alexander Kremer, Elizabeth Stone, Richard Carl Zimmerman |
2007-02-06 |
| 7088527 |
Uniformity correction system having light leak and shadow compensation |
— |
2006-08-08 |
| 7085793 |
Method and system for efficient and accurate processing of a discrete time input signal |
— |
2006-08-01 |
| 7024440 |
Method and system for processing a discrete time input signal where the clock rate of a discrete time output signal is a multiple of the clock rate of input signal samples |
— |
2006-04-04 |
| 6993411 |
System and method for discrete time trajectory planning for lithography |
— |
2006-01-31 |
| 6766339 |
Method and system for efficient and accurate filtering and interpolation |
— |
2004-07-20 |
| 6760641 |
Discrete time trajectory planner for lithography system |
— |
2004-07-06 |
| 5901682 |
Method for transitioning between different operating modes of an internal combustion engine |
Brian G. McGee |
1999-05-11 |
