Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106963 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more | 2024-10-01 |
| 11670510 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more | 2023-06-06 |
| 11133216 | Interconnect structure | Hsueh-Chung Chen, Chih-Chao Yang | 2021-09-28 |
| 11018007 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more | 2021-05-25 |
| 10957583 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2021-03-23 |
| 10699945 | Back end of line integration for interconnects | Cornelius Brown Peethala, Raghuveer R. Patlolla, Chih-Chao Yang | 2020-06-30 |
| 10615116 | Surface nitridation in metal interconnects | Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2020-04-07 |
| 10546774 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2020-01-28 |
| 10529621 | Modulating the microstructure of metallic interconnect structures | Michael Rizzolo, Chih-Chao Yang | 2020-01-07 |
| 10529569 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more | 2020-01-07 |
| 10483091 | Selective ion filtering in a multipurpose chamber | Lawrence A. Clevenger, Theodorus E. Standaert, Wei Wang, Chih-Chao Yang | 2019-11-19 |
| 10395985 | Self aligned conductive lines with relaxed overlay | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2019-08-27 |
| 10373909 | Selective surface modification of interconnect structures | Raghuveer R. Patlolla, Cornelius Brown Peethala, Chih-Chao Yang | 2019-08-06 |
| 10361153 | Surface nitridation in metal interconnects | Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2019-07-23 |
| 10256185 | Nitridization for semiconductor structures | Lawrence A. Clevenger, Hosadurga Shobha, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2019-04-09 |
| 10249532 | Modulating the microstructure of metallic interconnect structures | Michael Rizzolo, Chih-Chao Yang | 2019-04-02 |
| 10134674 | Structure and method for improved stabilization of cobalt cap and/or cobalt liner in interconnects | Benjamin D. Briggs, James J. Kelly, Koichi Motoyama, Michael Rizzolo, Theodorus E. Standaert | 2018-11-20 |
| 10128147 | Interconnect structure | Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2018-11-13 |
| 10121661 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more | 2018-11-06 |
| 10083864 | Self aligned conductive lines with relaxed overlay | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2018-09-25 |
| 10068846 | Surface nitridation in metal interconnects | Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2018-09-04 |
| 9991156 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2018-06-05 |
| 9972533 | Aligning conductive vias with trenches | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot +2 more | 2018-05-15 |
| 9953864 | Interconnect structure | Lawrence A. Clevenger, Terry A. Spooner, Wei Wang, Chih-Chao Yang | 2018-04-24 |
| 9934970 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy +2 more | 2018-04-03 |