Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784076 | Substrate transfer mechanism to reduce back-side substrate contact | Masato Ishii, Richard O. Collins, Alexander Berger | 2023-10-10 |
| 11424149 | Substrate transfer mechanism to reduce back-side substrate contact | Masato Ishii, Richard O. Collins, Alexander Berger | 2022-08-23 |
| 10755955 | Substrate transfer mechanism to reduce back-side substrate contact | Masato Ishii, Richard O. Collins, Alexander Berger | 2020-08-25 |
| 10217650 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Leon Volfovski +1 more | 2019-02-26 |
| 9443714 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Leon Volfovski +1 more | 2016-09-13 |
| 9177842 | Degassing apparatus adapted to process substrates in multiple tiers with second actuator | Eric A. Englhardt, Jeffrey C. Hudgens, Igor Kogan, Michael R. Rice, Sushant S. Koshti | 2015-11-03 |
| 5980194 | Wafer position error detection and correction system | Frederik W. Freerks, Lloyd M. Berken, M. Uenia Crithfield, David Schott, Michael R. Rice +4 more | 1999-11-09 |