Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Chien-Teh Kao, Benjamin Schmiege, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei +7 more | 2018-01-30 |
| 9583349 | Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitride | Srinivas Gandikota, Zhendong Liu, Jianxin Lei | 2017-02-28 |
| 9514933 | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition | Yu Lei, Srinivas Gandikota, Seshadri Ganguli, Bo Zheng, Martin Jeff Salinas +1 more | 2016-12-06 |
| 9461137 | Tungsten silicide nitride films and methods of formation | Jothilingam Ramalingam, Jianxin Lei, Zhiyong Wang | 2016-10-04 |
| 9162930 | PVD ALN film with oxygen doping for a low etch rate hardmask film | Yong Cao, Kazuya Daito, Xianmin Tang | 2015-10-20 |
| 8778797 | Systems and methods for selective tungsten deposition in vias | Juwen Gao, Michal Danek, Wei Lei | 2014-07-15 |
| 8585873 | Methods and apparatus for sputtering | Mark Ashley Ford | 2013-11-19 |
| 7327073 | Acoustic resonators | Christine Shearer, Carl Brancher | 2008-02-05 |
| 7141913 | Acoustic resonators | Christine Shearer, Carl Brancher | 2006-11-28 |
| 6944922 | Method of forming an acoustic resonator | Christine Shearer, Carl Brancher | 2005-09-20 |