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Wavefront optimization for tuning scanner based on performance matching |
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Method for determining curvilinear patterns for patterning device |
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2023-08-22 |
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Methods of tuning process models |
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2023-03-28 |
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Wavefront optimization for tuning scanner based on performance matching |
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2023-02-21 |
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Method for determining patterning device pattern based on manufacturability |
Roshni Biswas, Cuiping Zhang, Ningning Jia, Jingjing Liu, Quan Zhang |
2023-02-14 |
| 11506984 |
Simulation of lithography using multiple-sampling of angular distribution of source radiation |
Duan-Fu Stephen Hsu, Jianjun Jia |
2022-11-22 |
| 11409203 |
Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device |
Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas |
2022-08-09 |
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Method for determining curvilinear patterns for patterning device |
Quan Zhang, Been-Der Chen, Jing Su, Yi Zou, Yen-Wen Lu |
2022-01-25 |
| 11054750 |
Profile aware source-mask optimization |
Duan-Fu Stephen Hsu, Feng-Liang Liu |
2021-07-06 |
| 11016395 |
Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device |
Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas |
2021-05-25 |
| 10990003 |
Binarization method and freeform mask optimization flow |
Duan-Fu Stephen Hsu, Jingjing Liu, Xingyue PENG |
2021-04-27 |
| 10558124 |
Discrete source mask optimization |
Xiaofeng Liu |
2020-02-11 |
| 10459346 |
Flows of optimization for lithographic processes |
Duan-Fu Stephen Hsu, Xiaofeng Liu |
2019-10-29 |
| 10401732 |
Optimization flows of source, mask and projection optics |
Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Xinjian Zhou, Yi-Fan Chen |
2019-09-03 |
| 10191384 |
Discrete source mask optimization |
Xiaofeng Liu |
2019-01-29 |
| 10025201 |
Flows of optimization for lithographic processes |
Duan-Fu Stephen Hsu, Xiaofeng Liu |
2018-07-17 |
| 9588438 |
Optimization flows of source, mask and projection optics |
Duan-Fu Stephen Hsu, Luoqi Chen, Hanying Feng, Xinjian Zhou, Yi-Fan Chen |
2017-03-07 |
| 8898599 |
Gradient-based pattern and evaluation point selection |
Xiaofeng Liu |
2014-11-25 |