Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8674255 | Apparatus and method for controlling etch uniformity | Eric H. Lenz, Dave Trussell, Lumin Li | 2014-03-18 |
| 8268117 | Showerhead electrodes | Greg Bettencourt, George Diercks, Randall A. Hardin, Jon Keihl, Duane Lytle +4 more | 2012-09-18 |
| 8216418 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings | Roger Patrick, Greg Bettencourt, Alexei Marakhtanov | 2012-07-10 |
| 8187413 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket | Roger Patrick, Greg Bettencourt, Alexei Marakhtanov | 2012-05-29 |
| 8152954 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Greg Bettencourt, George Diercks, Randall A. Hardin, Jon Keihl, Duane Lytle +4 more | 2012-04-10 |
| 7405521 | Multiple frequency plasma processor method and apparatus | S. M. Reza Sadjadi, Felix Kozakevich, Dave Trussell, Lumin Li, Eric H. Lenz +5 more | 2008-07-29 |
| 7169256 | Plasma processor with electrode responsive to multiple RF frequencies | Felix Kozakevich, David Trussell | 2007-01-30 |