Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815402 | Wavefront sensor and associated metrology apparatus | Sietse Thijmen Van Der Post | 2023-11-14 |
| 11243470 | Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method | Nitish Kumar, Adrianus Johannes Hendrikus Schellekens, Sietse Thijmen Van Der Post, Ferry Zijp, Willem Coene +2 more | 2022-02-08 |
| 11129266 | Optical system, metrology apparatus and associated method | — | 2021-09-21 |
| 10725381 | Optical systems, metrology apparatus and associated method | Sietse Thijmen Van Der Post, Stefan Michael Bruno Bäumer, Teunis Willem Tukker, Ferry Zijp, Han-Kwang Nienhuys +1 more | 2020-07-28 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Gerrit Jacobus Hendrik Brussaard, Petrus Wilhelmus SMORENBURG, Teis Johan Coenen, Niels Geypen, Sander Bas Roobol | 2020-06-02 |
| 10451559 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Sietse Thijmen Van Der Post | 2019-10-22 |
| 10330606 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Sietse Thijmen Van Der Post | 2019-06-25 |
| 10185224 | Method and apparatus for inspection and metrology | Ferry Zijp, Duygu Akbulut, Jeroen Johan Maarten Van De Wijdeven, Koos Van Berkel | 2019-01-22 |
| 9811001 | Method and apparatus for inspection and metrology | Duygu Akbulut, Koos Van Berkel, Jeroen Johan Maarten Van De Wijdeven, Ferry Zijp | 2017-11-07 |