Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1055006 | Support ring for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Andreas Schmid | 2024-12-24 |
| 12148645 | Calibration jig and calibration method | Andrew Myles, Denis M. Koosau, Phillip Criminale | 2024-11-19 |
| D1042373 | Sliding ring for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Andreas Schmid | 2024-09-17 |
| D1042374 | Support pipe for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Andreas Schmid | 2024-09-17 |
| 11935773 | Calibration jig and calibration method | Andrew Myles, Denis M. Koosau, Phillip Criminale | 2024-03-19 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Denis M. Koosau, Rajinder Dhindsa +1 more | 2023-06-06 |
| 10748748 | RF impedance model based fault detection | John C. Valcore, Jr., James Rogers, Nicholas Webb | 2020-08-18 |
| 10128090 | RF impedance model based fault detection | John C. Valcore, Jr., James Rogers, Nicholas Webb | 2018-11-13 |
| 8906164 | Methods for stabilizing contact surfaces of electrostatic chucks | Chris Kimball, Tom Stevenson | 2014-12-09 |