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Ionic additives for extreme low dielectric constant chemical formulations |
Robert P. Mandal, Alexandros T. Demos, Timothy Weidman, Nikolaos Bekiaris, Scott J. Weigel +3 more |
2007-09-04 |
| 6896955 |
Ionic additives for extreme low dielectric constant chemical formulations |
Robert P. Mandal, Alexandros T. Demos, Timothy Weidman, Nikolaos Bekiaris, Scott J. Weigel +3 more |
2005-05-24 |
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Capping layer for extreme low dielectric constant films |
Timothy Weidman, Josephine Chang |
2005-04-05 |
| 6843881 |
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber |
Bok Hoen Kim, Nam Le, Martin Jay Seamons, Ameeta Madhava, Thomas Nowak +2 more |
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Mesoporous films having reduced dielectric constants |
James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more |
2004-11-16 |
| 6592980 |
Mesoporous films having reduced dielectric constants |
James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more |
2003-07-15 |
| 6583071 |
Ultrasonic spray coating of liquid precursor for low K dielectric coatings |
Timothy Weidman, Yunfeng Lu, Michael Barnes, Farhad Moghadam |
2003-06-24 |
| 6576568 |
Ionic additives for extreme low dielectric constant chemical formulations |
Robert P. Mandal, Alexandros T. Demos, Timothy Weidman, Nikolaos Bekiaris, Scott J. Weigel +3 more |
2003-06-10 |
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Method and apparatus for improving gap-fill capability using chemical and physical etchbacks |
Soonil Hong, Choon Kun Ryu, Kaushal K. Singh, Anthony Lam, Virendra V. Rana +1 more |
2001-02-20 |
| 5990000 |
Method and apparatus for improving gap-fill capability using chemical and physical etchbacks |
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1999-11-23 |
