Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112511 | Radiation detector and compton camera | — | 2021-09-07 |
| 9036789 | X-ray apparatus and its adjusting method | Fumitaro Masaki, Naoya Iizuka, Akira Miyake | 2015-05-19 |
| 9020098 | Radiation imaging apparatus | Takeo Tsukamoto, Ichiro Nomura, Akira Miyake, Osamu Tsujii | 2015-04-28 |
| 9020102 | X-ray optical apparatus | Ichiro Nomura, Takeo Tsukamoto, Akira Miyake | 2015-04-28 |
| 9020104 | X-ray optical apparatus and adjusting method thereof | Naoya Iizuka, Akira Miyake | 2015-04-28 |
| 7633598 | Filter exposure apparatus, and device manufacturing method | — | 2009-12-15 |
| 7465936 | Measuring method, exposure apparatus, and device manufacturing method | — | 2008-12-16 |
| 7312459 | Apparatus for evaluating EUV light source, and evaluation method using the same | Akira Miyake | 2007-12-25 |
| 7271875 | Alignment apparatus, exposure apparatus and device fabrication method | Masahito Shinohara | 2007-09-18 |
| 7014707 | Apparatus and process for producing crystal article, and thermocouple used therein | — | 2006-03-21 |
| 6647086 | X-ray exposure apparatus | Yutaka Watanabe | 2003-11-11 |
| 6645707 | Device manufacturing method | Shunichi Uzawa, Keiko Chiba, Yutaka Watanabe | 2003-11-11 |
| 6647087 | Exposure method | Shunichi Uzawa | 2003-11-11 |
| 6642528 | Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method | Masami Tsukamoto | 2003-11-04 |
| 6455203 | Mask structure and method of manufacturing the same | Shunichi Uzawa, Keiko Chiba | 2002-09-24 |
| 6453001 | X-ray exposure apparatus | Yutaka Watanabe | 2002-09-17 |
| 6331709 | Alignment mark detection method, and alignment method, exposure method and device, and device production method making use of the alignment mark detection method | Masami Tsukamoto | 2001-12-18 |
| 6327332 | Exposure method | Shunichi Uzawa | 2001-12-04 |
| 6324250 | Exposure method | Shunichi Uzawa, Yutaka Watanabe | 2001-11-27 |
| 6272202 | Exposure method and X-ray mask structure for use with the same | Keiko Chiba, Shunichi Uzawa, Yutaka Watanabe | 2001-08-07 |
| 5835560 | Exposure apparatus | Yutaka Watanabe, Kazuyuki Kasumi | 1998-11-10 |
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1998-10-13 |
| 5680428 | Process for holding an object | Shunichi Uzawa | 1997-10-21 |
| 5606586 | X-ray exposure method and apparatus and device manufacturing method | Yasuaki Fukuda, Yutaka Watanabe, Akira Miyake | 1997-02-25 |
| 5604779 | Optical exposure method and device formed by the method | Yutaka Watanabe | 1997-02-18 |