Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017182 | Method for depositing thin films by mixed pulsed CVD and ALD | Martin Knapp, Suvi Haukka | 2011-09-13 |
| 7374941 | Active reactant vapor pulse monitoring in a chemical reactor | Niklas Bondestam | 2008-05-20 |
| 7273819 | Method and apparatus for processing semiconductor substrates | Theodorus Gerardus Maria Oosterlaken, Frank Huussen | 2007-09-25 |
| 7077614 | Sorting/storage device for wafers and method for handling thereof | Albert Hasper, Sebastiaan Eliza Nooten | 2006-07-18 |
| 7063981 | Active pulse monitoring in a chemical reactor | Niklas Bondestram | 2006-06-20 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka, Kai-Erik Elers +3 more | 2004-07-06 |
| 6740602 | Method of forming low-dielectric constant film on semiconductor substrate by plasma reaction using high-RF power | Naoto Tsuji, Satoshi Takahashi | 2004-05-25 |
| 5922624 | Method for semiconductor processing using mixtures of HF and carboxylic acid | Steven Verhaverbeke, Mark Heyns, Rene de Blank | 1999-07-13 |