Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9708508 | Slurry for chemical-mechanical polishing of metals and use thereof | Graham M. Bates, Michael T. Brigham, Joseph K. V. Comeau, Jason P. Ritter, Eva A. Shah +1 more | 2017-07-18 |
| 9057004 | Slurry for chemical-mechanical polishing of metals and use thereof | Graham M. Bates, Michael T. Brigham, Joseph K. V. Comeau, Jason P. Ritter, Eva A. Shah +1 more | 2015-06-16 |
| 8806740 | Silicon chicklet pedestal | S. Jay Chey, Timothy C. Krywanczyk, Mohammed S. Shaikh, Cornelia K. Tsang | 2014-08-19 |
| 8734665 | Slurry for chemical-mechanical polishing of copper and use thereof | Graham M. Bates, Michael T. Brigham, Joseph K. V. Comeau, Jason P. Ritter, Eva A. Shah +1 more | 2014-05-27 |
| 8636917 | Solution for forming polishing slurry, polishing slurry and related methods | Joseph K. V. Comeau, Marina M. Katsnelson, Eric J. White | 2014-01-28 |
| 8595919 | Silicon chicklet pedestal | S. Jay Chey, Timothy C. Krywanczyk, Mohammed S. Shaikh, Cornelia K. Tsang | 2013-12-03 |
| 8328892 | Solution for forming polishing slurry, polishing slurry and related methods | Joseph K. V. Comeau, Marina M. Katsnelson, Eric J. White | 2012-12-11 |
| 8088690 | CMP method | Thomas L. McDevitt, Graham M. Bates, Eva A. Shah, Eric J. White | 2012-01-03 |
| 7987591 | Method of forming silicon chicklet pedestal | S. Jay Chey, Timothy C. Krywanczyk, Mohammed S. Shaikh, Cornelia K. Tsang | 2011-08-02 |
| 7824568 | Solution for forming polishing slurry, polishing slurry and related methods | Joseph K. V. Comeau, Marina M. Katsnelson, Eric J. White | 2010-11-02 |
| 6355565 | Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers | Paul M. Feeney, Timothy C. Krywanczyk, Lawrence D. David, Eric J. White | 2002-03-12 |
| 6294105 | Chemical mechanical polishing slurry and method for polishing metal/oxide layers | Paul M. Feeney, Timothy C. Krywanczyk, Lawrence D. David, Eric J. White | 2001-09-25 |
| 5944583 | Composite polish pad for CMP | Jose Luis Cruz, Steven J. Messier, Douglas K. Sturtevant | 1999-08-31 |
| 5885135 | CMP wafer carrier for preferential polishing of a wafer | Daniel D. Desorcie, Richard J. Lebel, Charles A. McKinney, Rock Nadeau, Timothy J. Rickard, Jr. +2 more | 1999-03-23 |
| 5842910 | Off-center grooved polish pad for CMP | Timothy C. Krywanczyk, Douglas K. Sturtevant | 1998-12-01 |