| 12241154 |
Holding system for holding substrates during a processing of the surfaces of the substrates |
Jens Eggemann, Christian Becker, Dieter Mueller |
2025-03-04 |
| 11993729 |
Chemical mechanical polishing composition |
Christian Daeschlein, Yongqing Lan, Michael Lauter, Sheik Ansar Usman Ibrahim, Reza Golzarian +4 more |
2024-05-28 |
| 11590528 |
Tool fixture for multiple process steps |
Remo Vogel, Mario Rombach, Philipp Bartholet, Masar Demiri, Dieter Mueller +3 more |
2023-02-28 |
| 11286402 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates |
Robert REICHARDT, Yongqing Lan, Michael Lauter, Sheik Ansar Usman Ibrahim, Reza Golzarian +3 more |
2022-03-29 |
| 11264250 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates |
Robert REICHARDT, Yongqing Lan, Michael Lauter, Sheik Ansar Usman Ibrahim, Reza Golzarian +3 more |
2022-03-01 |
| 10899945 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substrates |
Robert REICHARDT, Yongqing Lan, Michael Lauter, Sheik Ansar Usman Ibrahim, Reza Golzarian +4 more |
2021-01-26 |
| 10865361 |
Composition for post chemical-mechanical-polishing cleaning |
Christian Daeschlein, Michael Lauter, Leonardus Leunissen, Ivan Garcia Romero, Haci Osman GUEVENC +3 more |
2020-12-15 |
| 10844325 |
Composition for post chemical-mechanical-polishing cleaning |
Christian Daeschlein, Michael Lauter, Peter Przybylski, Julian Proelss, Andreas Klipp +4 more |
2020-11-24 |
| 10844333 |
Composition for post chemical-mechanical-polishing cleaning |
Christian Daeschlein, Michael Lauter, Piotr Przybylski, Julian Proelss, Andreas Klipp +4 more |
2020-11-24 |
| 10738219 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates |
Robert REICHARDT, Yongqing Lan, Michael Lauter, Sheik Ansar Usman Ibrahim, Reza Golzarian +3 more |
2020-08-11 |
| D881242 |
Tool holder |
Ewald Riedel, Armin Vester |
2020-04-14 |
| 10570316 |
Chemical mechanical polishing (CMP) composition |
Robert REICHARDT, Yongqing Lan, Michael Lauter, Haci Osman GUEVENC, Julian Proelss +2 more |
2020-02-25 |
| 10385236 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates |
Robert REICHARDT, Yongqing Lan, Michael Lauter, Sheik Ansar Usman Ibrahim, Reza Golzarian +3 more |
2019-08-20 |
| 10227506 |
Chemical mechanical polishing (CMP) composition for high effective polishing of substrates comprising germanium |
Michael Lauter, Yongqing Lan, Robert REICHARDT, Alexandra Muench, Manuel SIX +4 more |
2019-03-12 |
| 10072326 |
Versatile holder for treating the surface of rod-shaped substrates |
Remo Vogel, Karl Wolfgang Jotz |
2018-09-11 |
| 9138381 |
Production of inorganic-organic composite materials by reactive spray-drying |
Andreas Kempter, Heidrun Debus |
2015-09-22 |
