Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6144504 | Projection and exposure apparatus including an optical member and a holding member | Yuji Sudoh, Ryuichi Ebinuma | 2000-11-07 |
| 5999270 | Projection exposure apparatus and microdevice manufacturing method using the same | Tetsuya Mori | 1999-12-07 |
| 5386269 | Alignment and exposure apparatus | — | 1995-01-31 |
| 5365342 | Alignment and exposure apparatus and method for manufacture of integrated circuits | Naoki Ayata, Mitsugu Yamamura, Bunei Hamasaki, Kazuo Takahashi, Mitsuaki Seki | 1994-11-15 |
| 5262822 | Exposure method and apparatus | Akiyoshi Suzuki | 1993-11-16 |
| 5160957 | Alignment and exposure apparatus | Hideki Ina, Akiyoshi Suzuki | 1992-11-03 |
| 5137363 | Projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina, Hitoshi Fukuda | 1992-08-11 |
| 5120134 | Exposure system including a device for analyzing an affect of a wafer resist upon a mark signal | — | 1992-06-09 |
| 5053670 | Precision actuator | — | 1991-10-01 |
| 5050111 | Alignment and exposure apparatus and method for manufacture of integrated circuits | Naoki Ayata, Mitsugu Yamamura, Bunei Hamasaki, Kazuo Takahashi, Mitsuaki Seki | 1991-09-17 |
| 4937618 | Alignment and exposure apparatus and method for manufacture of integrated circuits | Naoki Ayata, Mitsugu Yamamura, Bunei Hamasaki, Kazuo Takahashi, Mitsuaki Seki | 1990-06-26 |
| 4910679 | Step-and-repeat alignment and exposure method and apparatus | Kazuo Takahashi | 1990-03-20 |
| 4888614 | Observation system for a projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina | 1989-12-19 |
| 4843563 | Step-and-repeat alignment and exposure method and apparatus | Kazuo Takahashi | 1989-06-27 |
| 4823012 | Step and repeat exposure apparatus having improved system for aligning | — | 1989-04-18 |
| 4814829 | Projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina, Kazuhito Outsuka, Shigeki Ogawa, Masao Totsuka +1 more | 1989-03-21 |
| 4786947 | Projection exposure apparatus | Toshikazu Matsushita, Shuichi Yabu, Masakatsu Ohta | 1988-11-22 |
| 4776462 | Container for a sheet-like article | Kazuo Iizuka | 1988-10-11 |
| 4775877 | Method and apparatus for processing a plate-like workpiece | Yukio Tokuda | 1988-10-04 |
| 4757355 | Mask storing mechanism | Kazuo Iizuka, Yukio Tokuda | 1988-07-12 |
| 4719357 | Semiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignment | Naoki Ayata, Tadashi Konuki | 1988-01-12 |
| 4682037 | Projection exposure apparatus having an alignment light of a wavelength other than that of the exposure light | — | 1987-07-21 |
| 4676631 | Device for adjusting projection magnification | Ichiro Kano | 1987-06-30 |
| 4648708 | Pattern transfer apparatus | — | 1987-03-10 |
| 4627010 | Method and device for discriminating stillness of a step exposure apparatus | — | 1986-12-02 |