Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4719357 | Semiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignment | Naoki Ayata, Masao Kosugi | 1988-01-12 |
| 4553834 | Mask aligner having a malfunction disposal device | Naoki Ayata | 1985-11-19 |
| 4530587 | Step type mask aligner | Masao Kosugi, Kazuo Iizuka | 1985-07-23 |