Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078595 | Method of producing silicon single crystal ingot and silicon single crystal ingot | Wataru Sugimura, Toshiaki Ono, Toshiyuki Fujiwara | 2021-08-03 |
| 8758505 | Silicon wafer and method for manufacturing the same | Toshiaki Ono, Wataru Sugimura | 2014-06-24 |
| 8617311 | Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT | Toshiaki Ono, Shigeru Umeno, Wataru Sugimura | 2013-12-31 |
| 8460463 | Silicon wafer and method for producing the same | Shigeru Umeno, Manabu Nishimoto | 2013-06-11 |
| 8411263 | Method of evaluating silicon wafer and method of manufacturing silicon wafer | Shin Uchino, Yasuo Koike, Ryuji Ohno | 2013-04-02 |
| 8252404 | High resistivity silicon wafers | Shinsuke Sadamitsu | 2012-08-28 |
| 8173523 | Method of removing heavy metal in semiconductor substrate | Noritomo Mitsugi, Shuichi Samata, Kiyoshi Nagai, Kei Matsumoto | 2012-05-08 |
| 8037761 | Quantitative evaluation device and method of atomic vacancy existing in silicon wafer | Terutaka Goto, Yuichi Nemoto, Hiroshi Kaneta | 2011-10-18 |
| 7936051 | Silicon wafer and its manufacturing method | Toshiaki Ono | 2011-05-03 |
| 7824493 | Silicon wafer and method for manufacturing the same | Toshiaki Ono, Wataru Sugimura | 2010-11-02 |
| 7803228 | Process for producing high-resistance silicon wafers and process for producing epitaxial wafers and SOI wafers | Kazunari Kurita, Shinsuke Sadamitsu, Hiroyuki Takao | 2010-09-28 |
| 7704318 | Silicon wafer, SOI substrate, method for growing silicon single crystal, method for manufacturing silicon wafer, and method for manufacturing SOI substrate | Wataru Sugimura, Toshiaki Ono, Tadami Tanaka | 2010-04-27 |
| 7700394 | Method for manufacturing silicon wafer method | Shinsuke Sadamitsu, Wataru Sugimura, Masanori Akatsuka | 2010-04-20 |
| 7637997 | Silicon wafer, method for producing silicon wafer and method for growing silicon single crystal | Toshiaki Ono, Wataru Sugimura | 2009-12-29 |
| 7563319 | Manufacturing method of silicon wafer | Shigeru Umeno, Masakazu Sano, Shinichiro Miki | 2009-07-21 |
| 7435294 | Method for manufacturing silicon single crystal, and silicon wafer | Toshiaki Ono, Wataru Sugimura | 2008-10-14 |
| 7384480 | Apparatus for manufacturing semiconductor single crystal | Wataru Sugimura, Toshiaki Ono | 2008-06-10 |
| 7374741 | Method for growing silicon single crystal and silicon wafer | Toshiaki Ono, Wataru Sugimura | 2008-05-20 |
| 7364618 | Silicon wafer, method for manufacturing the same and method for growing silicon single crystals | Wataru Sugimura, Toshiaki Ono | 2008-04-29 |
| 7320731 | Process for growing silicon single crystal and process for producing silicon wafer | Toshiaki Ono, Wataru Sugimura | 2008-01-22 |
| 7306676 | Apparatus for manufacturing semiconductor single crystal | Wataru Sugimura, Toshiaki Ono | 2007-12-11 |
| 7300517 | Manufacturing method of hydrogen-doped silicon single crystal | Wataru Sugimura | 2007-11-27 |
| 7258739 | Process for producing epitaxial silicon wafer and silicon wafer produced by process thereof | Toshiaki Ono | 2007-08-21 |
| 7226571 | High resistivity silicon wafer and method for fabricating the same | Nobumitsu Takase, Shinsuke Sadamitsu, Takayuki Kihara | 2007-06-05 |
| RE39173 | Silicon single crystal wafer | Eiji Kajita | 2006-07-11 |