Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8578777 | Method for quantitatively evaluating concentration of atomic vacancies existing in silicon wafer, method for manufacturing silicon wafer, and silicon wafer manufactured by the method for manufacturing silicon wafer | Hiroshi Kaneta, Yuichi Nemoto, Mitsuhiro Akatsu | 2013-11-12 |
| 8215175 | Quantitative evaluation device of atomic vacancies existing in silicon wafer, method for the device, silicon wafer manufacturing method, and thin-film oscillator | Hiroshi Kaneta, Yuichi Nemoto | 2012-07-10 |
| 8037761 | Quantitative evaluation device and method of atomic vacancy existing in silicon wafer | Yuichi Nemoto, Hiroshi Kaneta, Masataka Hourai | 2011-10-18 |