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Method of predicting thermal donor formation behavior in silicon wafer, method of evaluating silicon wafer, and method of producing silicon wafer |
Kazuhisa Torigoe, Toshiaki Ono |
2021-09-14 |
| 11094557 |
Silicon wafer |
Toshiaki Ono |
2021-08-17 |
| 10177008 |
Silicon wafer and method for manufacturing the same |
Takashi Nakayama, Takeo Katoh, Kazumi Tanabe |
2019-01-08 |
| 9412622 |
Epitaxial silicon wafer and method for manufacturing same |
Toshiaki Ono |
2016-08-09 |
| 8771415 |
Method of manufacturing silicon single crystal, silicon single crystal ingot, and silicon wafer |
Keiichiro HIRAKI, Hiroaki Taguchi |
2014-07-08 |
| 8617311 |
Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT |
Toshiaki Ono, Wataru Sugimura, Masataka Hourai |
2013-12-31 |
| 8460463 |
Silicon wafer and method for producing the same |
Manabu Nishimoto, Masataka Hourai |
2013-06-11 |
| 8231852 |
Silicon wafer and method for producing the same |
Wataru Itou, Takashi Nakayama, Hiroaki Taguchi, Yasuo Koike |
2012-07-31 |
| 8105436 |
Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same |
— |
2012-01-31 |
| 7846252 |
Silicon wafer for IGBT and method for producing same |
Yasuhiro Oura, Koji Kato |
2010-12-07 |
| 7629054 |
Single crystal silicon wafer for insulated gate bipolar transistors |
— |
2009-12-08 |
| 7563319 |
Manufacturing method of silicon wafer |
Masataka Hourai, Masakazu Sano, Shinichiro Miki |
2009-07-21 |
| 7344689 |
Silicon wafer for IGBT and method for producing same |
Yasuhiro Oura, Koji Kato |
2008-03-18 |
| 7288791 |
Epitaxial wafer and method for manufacturing method |
Satoshi Murakami, Hirotaka Fujii |
2007-10-30 |
| 7014704 |
Method for growing silicon single crystal |
Toshiaki Ono, Tadami Tanaka, Eiichi Asayama, Hideshi Nishikawa |
2006-03-21 |
| 6641888 |
Silicon single crystal, silicon wafer, and epitaxial wafer. |
Eiichi Asayama, Masataka Horai, Shinsuke Sadamitsu, Yasuo Koike, Kouji Sueoka +1 more |
2003-11-04 |
| 6365461 |
Method of manufacturing epitaxial wafer |
Eiichi Asayama, Masataka Hourai |
2002-04-02 |