Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7397110 | High resistance silicon wafer and its manufacturing method | Nobumitsu Takase, Makoto Ito, Koji Sueoka, Shinsuke Sadamitsu | 2008-07-08 |
| 7273647 | Silicon annealed wafer and silicon epitaxial wafer | Nobumitsu Takase, Kazuyuki Egashira, Hiroshi Hayakawa | 2007-09-25 |
| 7220308 | Manufacturing method of high resistivity silicon single crystal | Nobumitsu Takase, Makoto Ito, Koujl Sueoka, Shinsuke Sadamitsu | 2007-05-22 |
| 7014704 | Method for growing silicon single crystal | Toshiaki Ono, Tadami Tanaka, Shigeru Umeno, Eiichi Asayama | 2006-03-21 |
| 6835245 | Method of manufacturing epitaxial wafer and method of producing single crystal as material therefor | Toshiaki Ono, Tadami Tanaka, Eiichi Asayama, Masataka Horai | 2004-12-28 |
| 6709957 | Method of producing epitaxial wafers | Eiichi Asayama, Yasuo Koike, Tadami Tanaka, Toshiaki Ono, Masataka Horai | 2004-03-23 |
| 6337219 | Method of producing silicon single and single crystal silicon wafer | — | 2002-01-08 |
| 5508207 | Method of annealing a semiconductor wafer in a hydrogen atmosphere to desorb surface contaminants | Masataka Horai, Naoshi Adachi, Masakazu Sano | 1996-04-16 |