Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7014704 | Method for growing silicon single crystal | Toshiaki Ono, Tadami Tanaka, Shigeru Umeno, Hideshi Nishikawa | 2006-03-21 |
| 6878451 | Silicon single crystal, silicon wafer, and epitaxial wafer | Masataka Horai, Hiroki Murakami, Takayuki Kubo | 2005-04-12 |
| 6835245 | Method of manufacturing epitaxial wafer and method of producing single crystal as material therefor | Toshiaki Ono, Tadami Tanaka, Hideshi Nishikawa, Masataka Horai | 2004-12-28 |
| 6709957 | Method of producing epitaxial wafers | Yasuo Koike, Tadami Tanaka, Toshiaki Ono, Masataka Horai, Hideshi Nishikawa | 2004-03-23 |
| 6641888 | Silicon single crystal, silicon wafer, and epitaxial wafer. | Masataka Horai, Shigeru Umeno, Shinsuke Sadamitsu, Yasuo Koike, Kouji Sueoka +1 more | 2003-11-04 |
| 6569237 | Method of pulling up silicon single crystal and method of manufacturing epitaxial wafer | Tadami Tanaka, Toshiaki Ono | 2003-05-27 |
| 6365461 | Method of manufacturing epitaxial wafer | Shigeru Umeno, Masataka Hourai | 2002-04-02 |