Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7316745 | High-resistance silicon wafer and process for producing the same | Shinsuke Sadamitsu, Nobumitsu Takase, Hiroyuki Takao, Koji Sueoka | 2008-01-08 |
| 6878451 | Silicon single crystal, silicon wafer, and epitaxial wafer | Eiichi Asayama, Hiroki Murakami, Takayuki Kubo | 2005-04-12 |
| 6835245 | Method of manufacturing epitaxial wafer and method of producing single crystal as material therefor | Toshiaki Ono, Tadami Tanaka, Eiichi Asayama, Hideshi Nishikawa | 2004-12-28 |
| 6709957 | Method of producing epitaxial wafers | Eiichi Asayama, Yasuo Koike, Tadami Tanaka, Toshiaki Ono, Hideshi Nishikawa | 2004-03-23 |
| 6641888 | Silicon single crystal, silicon wafer, and epitaxial wafer. | Eiichi Asayama, Shigeru Umeno, Shinsuke Sadamitsu, Yasuo Koike, Kouji Sueoka +1 more | 2003-11-04 |
| 6113687 | Method for making a silicon single crystal wafer | Kazuyuki Egashira, Tadami Tanaka | 2000-09-05 |
| 5508207 | Method of annealing a semiconductor wafer in a hydrogen atmosphere to desorb surface contaminants | Naoshi Adachi, Hideshi Nishikawa, Masakazu Sano | 1996-04-16 |