Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8568537 | Epitaxial wafer and method of producing the same | Tamio Motoyama | 2013-10-29 |
| 8105078 | Heat treatment jig for semiconductor silicon substrates and method for manufacturing the same | — | 2012-01-31 |
| 8030184 | Epitaxial wafer and method of producing the same | Tamio Motoyama | 2011-10-04 |
| 7560363 | Manufacturing method for SIMOX substrate | Yukio Komatsu | 2009-07-14 |
| 7442038 | Heat treatment jig for semiconductor silicon substrate | — | 2008-10-28 |
| 7331780 | Heat treatment jig for semiconductor wafer | — | 2008-02-19 |
| 7329947 | Heat treatment jig for semiconductor substrate | Kazushi Yoshida, Yoshiro Aoki | 2008-02-12 |
| 7253082 | Pasted SOI substrate, process for producing the same and semiconductor device | Masahiko Nakamae | 2007-08-07 |
| 7210925 | Heat treatment jig for silicon semiconductor substrate | — | 2007-05-01 |
| 7163393 | Heat treatment jig for semiconductor silicon substrate | — | 2007-01-16 |
| 6875643 | SOI substrate and manufacturing method thereof | Masanori Akatsuka | 2005-04-05 |
| 6129787 | Semiconductor silicon wafer, semiconductor silicon wafer fabrication method and annealing equipment | Masakazu Sano, Shinsuke Sadamitsu, Tsuyoshi Kubota | 2000-10-10 |
| 6074479 | Silicon single crystal wafer annealing method and equipment, and silicon single crystal wafer and manufacturing method related thereto | Takehiro Hisatomi, Masakazu Sano | 2000-06-13 |
| 5931662 | Silicon single crystal wafer annealing method and equipment and silicon single crystal wafer and manufacturing method related thereto | Takehiro Hisatomi, Masakazu Sano | 1999-08-03 |
| 5508207 | Method of annealing a semiconductor wafer in a hydrogen atmosphere to desorb surface contaminants | Masataka Horai, Hideshi Nishikawa, Masakazu Sano | 1996-04-16 |