Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6074479 | Silicon single crystal wafer annealing method and equipment, and silicon single crystal wafer and manufacturing method related thereto | Naoshi Adachi, Masakazu Sano | 2000-06-13 |
| 5931662 | Silicon single crystal wafer annealing method and equipment and silicon single crystal wafer and manufacturing method related thereto | Naoshi Adachi, Masakazu Sano | 1999-08-03 |