Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7700394 | Method for manufacturing silicon wafer method | Shinsuke Sadamitsu, Wataru Sugimura, Masataka Hourai | 2010-04-20 |
| 6875643 | SOI substrate and manufacturing method thereof | Naoshi Adachi | 2005-04-05 |
| 6599816 | Method of manufacturing silicon epitaxial wafer | Kouji Sueoka, Yasuo Koike | 2003-07-29 |
| 5587793 | Birefringence distribution measuring method | Sadao Nakai, Yasukazu Izawa, Masanobu Yamanaka, Masato Ohmi, Chiyoe Yamanaka +1 more | 1996-12-24 |