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Method for controlling convection pattern of silicon melt and method for producing monocrystalline silicon |
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2021-11-30 |
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2021-08-03 |
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Method and apparatus for manufacturing silicon single crystal |
Ryusuke Yokoyama, Mitsuaki Hayashi |
2020-12-08 |
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Apparatus for manufacturing silicon single crystal and melt inlet pipe of the same |
Mitsuaki Hayashi, Ippei Shimozaki |
2019-09-17 |
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Silicon wafer and method for manufacturing the same |
Toshiaki Ono, Masataka Hourai |
2014-06-24 |
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Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT |
Toshiaki Ono, Shigeru Umeno, Masataka Hourai |
2013-12-31 |
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Silicon wafer and method for manufacturing the same |
Toshiaki Ono, Masataka Hourai |
2010-11-02 |
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Process for producing SOI substrate and process for regeneration of layer transferred wafer in the production |
Akihiko Endo, Toshiaki Ono |
2010-09-07 |
| 7704318 |
Silicon wafer, SOI substrate, method for growing silicon single crystal, method for manufacturing silicon wafer, and method for manufacturing SOI substrate |
Masataka Hourai, Toshiaki Ono, Tadami Tanaka |
2010-04-27 |
| 7700394 |
Method for manufacturing silicon wafer method |
Shinsuke Sadamitsu, Masanori Akatsuka, Masataka Hourai |
2010-04-20 |
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Silicon wafer, method for producing silicon wafer and method for growing silicon single crystal |
Toshiaki Ono, Masataka Hourai |
2009-12-29 |
| 7628854 |
Process for producing silicon single crystal |
Toshiaki Ono, Takayuki Kubo, Akira Higuchi, Ken Nakajima |
2009-12-08 |
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Method for manufacturing silicon single crystal, and silicon wafer |
Toshiaki Ono, Masataka Hourai |
2008-10-14 |
| 7384480 |
Apparatus for manufacturing semiconductor single crystal |
Toshiaki Ono, Masataka Hourai |
2008-06-10 |
| 7374741 |
Method for growing silicon single crystal and silicon wafer |
Toshiaki Ono, Masataka Hourai |
2008-05-20 |
| 7364618 |
Silicon wafer, method for manufacturing the same and method for growing silicon single crystals |
Masataka Hourai, Toshiaki Ono |
2008-04-29 |
| 7320731 |
Process for growing silicon single crystal and process for producing silicon wafer |
Toshiaki Ono, Masataka Hourai |
2008-01-22 |
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Apparatus for manufacturing semiconductor single crystal |
Toshiaki Ono, Masataka Hourai |
2007-12-11 |
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Manufacturing method of hydrogen-doped silicon single crystal |
Masataka Hourai |
2007-11-27 |