Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142645 | Silicon wafer and manufacturing method of the same | Toshiaki Ono, Shunya Kawaguchi | 2024-11-12 |
| 11888036 | Method for setting a nitrogen concentration of a silicon epitaxial film in manufacturing an epitaxial silicon wafer | Kazuya Kodani, Toshiaki Ono | 2024-01-30 |
| 11695048 | Silicon wafer and manufacturing method of the same | Toshiaki Ono, Shunya Kawaguchi | 2023-07-04 |
| 11121003 | Method of predicting thermal donor formation behavior in silicon wafer, method of evaluating silicon wafer, and method of producing silicon wafer | Shigeru Umeno, Toshiaki Ono | 2021-09-14 |
| 10861990 | Epitaxial silicon wafer | Toshiaki Ono | 2020-12-08 |
| 9818609 | Epitaxial-silicon-wafer manufacturing method and epitaxial silicon wafer | Toshiaki Ono | 2017-11-14 |
| 9281216 | Manufacturing method of epitaxial silicon wafer | Toshiaki Ono | 2016-03-08 |