Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372223 | Method of evaluating metal contamination in semiconductor sample and method of manufacturing semiconductor substrate | Kei Matsumoto | 2016-06-21 |
| 8481346 | Method of analyzing iron concentration of boron-doped P-type silicon wafer and method of manufacturing silicon wafer | Hisao Iga | 2013-07-09 |
| 8411263 | Method of evaluating silicon wafer and method of manufacturing silicon wafer | Shin Uchino, Masataka Hourai, Yasuo Koike | 2013-04-02 |