Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553438 | Semiconductor device and method for fabricating the same | Yun-Kyeong Jang, Sang Jin Kim, Dong Woon PARK, Joon-soo Park, Chang-Jae Yang +1 more | 2020-02-04 |
| 10553429 | Method of forming pattern of semiconductor device | Boo-Hyun Ham, Hyun Jae Kang, Sung-Sik Park, Yong-Kug Bae, Bum-Joon Youn +1 more | 2020-02-04 |
| 10276373 | Method of manufacturing a semiconductor device | Yong Chul Jeong, Tae Kyu Lee, Sung-Sik Park, Joon-soo Park, Boo-Hyun Ham | 2019-04-30 |
| 9927720 | Substrate target for in-situ lithography metrology, metrology method for in-situ lithography, and method of manufacturing integrated circuit device by using in-situ metrology | Ji-myung Kim, Gyu Min Jeong, Tae-hwa Jeong | 2018-03-27 |
| 9557655 | Photomask including focus metrology mark, substrate target including focus monitor pattern, metrology method for lithography process, and method of manufacturing integrated circuit device | Ji-myung Kim, Yong Chul Kim, Young-Sik Park | 2017-01-31 |
| 9373698 | Methods of manufacturing semiconductor devices and electronic devices | Tae Sun Kim, Jae-Kyung Seo, Ji Ho Kim, Bum-Joon Youn, Ki-Man Lee | 2016-06-21 |
| 9312188 | Method for fabricating semiconductor device | Ju-Youn Kim, Sang Duk Park, Jae-Kyung Seo, In-Gu Yoon | 2016-04-12 |
| 9123655 | Methods of forming layer patterns of a semiconductor device | Tae-Hwan Oh, Yu Ra KIM, Tae Sun Kim | 2015-09-01 |
| 8263487 | Method of forming patterns of semiconductor device | Dong Ki Yoon, Shi-Yong Yi, Seong-woon Choi, Seok-Hwan Oh, Myeong-Cheol Kim +1 more | 2012-09-11 |
| 7863231 | Thinner composition and method of removing photoresist using the same | Seung-Hyun Ahn, Eun-Mi Bae, Baik-Soon Choi, Sang-Mun Chon, Dae-Joung Kim +5 more | 2011-01-04 |
| 7457058 | Optical element holder and projection exposure apparatus having the same | Woo-Seok Shim, Jung-hyeon Lee, Young-Koog Han, Si-hyeung Lee | 2008-11-25 |
| 7449383 | Method of manufacturing a capacitor and method of manufacturing a dynamic random access memory device using the same | Jung-hyeon Lee, Bong-Cheol Kim, Se Young Park | 2008-11-11 |
| 7387988 | Thinner composition and method of removing photoresist using the same | Seung-Hyun Ahn, Eun-Mi Bae, Baik-Soon Choi, Sang-Mun Chon, Dae-Joung Kim +5 more | 2008-06-17 |
| 7241552 | Resist composition comprising photosensitive polymer having lactone in its backbone | Dong-won Jung, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more | 2007-07-10 |
| 7202011 | Photosensitive polymer including fluorine and resist composition containing the same | Sang-Gyun Woo, Ki Yong Song, Sang-jun Choi | 2007-04-10 |
| 7045267 | Resist composition comprising photosensitive polymer having lactone in its backbone | Dong-won Jung, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more | 2006-05-16 |
| 6933096 | Photosensitive polymer including fluorine, resist composition containing the same and patterning method using the resist composition | Ki Yong Song | 2005-08-23 |
| 6844134 | Photosenseitive polymer having fluorinated ethylene glycol group and chemically amplified resist composition comprising the same | Sang-jun Choi, Joo-tae Moon, Sang-Gyun Woo, Ki Yong Song | 2005-01-18 |
| 6800418 | Fluorine-containing photosensitive polymer having hydrate structure and resist composition comprising the same | Ki Yong Song, Sang-jun Choi, Sang-Gyun Woo | 2004-10-05 |
| 6696217 | Photosensitive monomer, photosensitive polymer and chemically amplified resist composition comprising lactone group having acid-labile protecting group | Sang-Gyun Woo | 2004-02-24 |
| 6642336 | Photosensitive polymer | Sook Lee, Ki Young Kwon, Si-hyeung Lee, Hyun-Woo Kim, Dong-won Jung +2 more | 2003-11-04 |
| 6596459 | Photosensitive polymer and resist composition containing the same | Hyun-Woo Kim, Ki Young Kwon, Si-hyeung Lee, Dong-won Jung, Sook Lee +2 more | 2003-07-22 |
| 6537727 | Resist composition comprising photosensitive polymer having loctone in its backbone | Dong-won Jung, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more | 2003-03-25 |