Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428730 | Apparatus for treating substrate | Ki Sang EUM, Woo-Ram Lee, Jong Wha KANG | 2025-09-30 |
| 12331399 | Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid | Ju Won Kim, Yang Yeol Ryu, Hee Man AHN, Jun Ho Seo, Sang Pil Yoon | 2025-06-17 |
| 12198893 | Plasma process monitoring apparatus using terahertz waves and monitoring method thereof | Hak-Sung Kim, Heon Su Kim, Sang-II Kim | 2025-01-14 |
| 12055378 | Thickness measuring device | Hak-Sung Kim, Gyung Hwan OH, Heon Su Kim | 2024-08-06 |
| 11829070 | Apparatus for treating a substrate | Ju Won Kim, Jun Ho Seo, Sang Pil Yoon | 2023-11-28 |
| 11781981 | Specimen inspection apparatus and specimen inspection method | Hak-Sung Kim, Gyung Hwan OH | 2023-10-10 |
| 11486822 | Specimen inspection device and specimen inspection method | Hak-Sung Kim, Gyung Hwan OH | 2022-11-01 |
| 11346659 | Device for measuring thickness of specimen and method for measuring thickness of specimen | Hak-Sung Kim, Gyung Hwan OH | 2022-05-31 |
| 11150080 | Thickness measurement apparatus, thickness measurement method, and thickness measurement program | Hak-Sung Kim, Gyung Hwan OH, Deok Joong Kim | 2021-10-19 |
| 10643888 | Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same | Jong Su Kim, Tae-Hoi Park, Yong-Kug Bae, Tae-Hwan Oh, Chang-Hoon Lee +1 more | 2020-05-05 |
| 10588842 | Use of silicone fluids as insecticides | John Y. Park | 2020-03-17 |
| 10553438 | Semiconductor device and method for fabricating the same | Yun-Kyeong Jang, Sang Jin Kim, Joon-soo Park, Chang-Jae Yang, Kwang-Sub Yoon +1 more | 2020-02-04 |
| 9711395 | Overlay marks, methods of forming the same, and methods of fabricating semiconductor devices using the same | Jong Su Kim, Tae-Hoi Park, Yong-Kug Bae, Tae-Hwan Oh, Chang-Hoon Lee +1 more | 2017-07-18 |
| 9631908 | Arrow | — | 2017-04-25 |
| 8871104 | Method of forming pattern, reticle, and computer readable medium for storing program for forming pattern | Hyun Jong Lee, Si-Young Choi, Yong-Kug Bae | 2014-10-28 |
| 8691693 | Methods of manufacturing semiconductor device | Sang Jin Kim, Jong-Chan Shin, Yong-Kug Bae, Do-Hyoung Kim | 2014-04-08 |
| 8341561 | Methods of arranging mask patterns and associated apparatus | Woo-Sung Han, Seong-woon Choi, Jeong-Ho Yeo | 2012-12-25 |
| 7954073 | Methods of arranging mask patterns responsive to assist feature contribution to image intensity and associated apparatus | — | 2011-05-31 |
| 7937676 | Method of arranging mask patterns and apparatus using the method | — | 2011-05-03 |
| 7877723 | Method of arranging mask patterns and apparatus using the method | — | 2011-01-25 |
| 7460210 | Auto focus system, auto focus method, and exposure apparatus using the same | — | 2008-12-02 |
| 7433048 | Interferometer systems for measuring displacement and exposure systems using the same | — | 2008-10-07 |