| 12428730 |
Apparatus for treating substrate |
Woo-Ram Lee, Jong Wha KANG, Dong Woon PARK |
2025-09-30 |
| 12429042 |
Torsion pump and chemical liquid supply unit |
Young Jun SON, Byoung Doo CHOI, Young Un YUN, Woo-Ram Lee, Sung Chul Jung +1 more |
2025-09-30 |
| 12331736 |
Pump, chemical liquid supplying unit, and substrate treating apparatus |
Young Jun SON, Byoung Doo CHOI, Sung Chul Jung, Woo Sin JUNG, Young Un YUN +1 more |
2025-06-17 |
| 12228861 |
Apparatus for treating substrate |
Jin Ho Choi, Sun Wook JUNG, Byoung Doo CHOI, Hee Man AHN, Si Eun Kim |
2025-02-18 |
| 12174553 |
Support unit, bake apparatus and substrate treating apparatus including the same |
Tae Hoon Lee, Jong Gun LEE |
2024-12-24 |
| 12140868 |
Substrate treating apparatus with exhaust airflow guide |
Sun Wook JUNG, Jin Ho Choi, Byoung Doo CHOI, Hee Man AHN |
2024-11-12 |
| 12124169 |
Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the same |
Sang Eun NOH, Chang Suk OH |
2024-10-22 |
| 12125717 |
Apparatus for treating substrate |
Jin Ho Choi, Byoung Doo CHOI, Seung Han Lee, Sun Wook JUNG, Si Eun Kim |
2024-10-22 |
| 11782348 |
Apparatus for treating substrate |
Gyeong Won SONG, Yang Yeol Ryu, Kyung Jin Seo |
2023-10-10 |
| 11766765 |
Substrate treatment apparatus |
Byoung Ok Kim, Jae Hun JEONG, Ju Eun Kim, Jun Ho Seo, Man Kyu Kang |
2023-09-26 |
| 11656557 |
Apparatus for treating substrate |
Jung Yul Lee, Sun Wook JUNG, Yang Yeol Ryu |
2023-05-23 |