Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776826 | Apparatus and method for treating substrate | Junho Kim, Kyungsik SHIN, Youngseo AN, Jinki Shin, Yoonki SA | 2023-10-03 |
| 11766765 | Substrate treatment apparatus | Ki Sang EUM, Byoung Ok Kim, Jae Hun JEONG, Ju Eun Kim, Jun Ho Seo | 2023-09-26 |
| 11735443 | Hot plate, substrate heat-treating apparatus including the hot plate, and method of fabricating the hot plate | Kyung-sik Shin, Jun Ho Kim | 2023-08-22 |
| 11415889 | Chemical supply structure and a developing apparatus having the same | Jong-Keun Oh, Kyoung-Noh Kim, Byung-Gook Kim | 2022-08-16 |
| 10763152 | Substrate support unit, heat treatment unit, and substrate treating apparatus including the same | Min Woo Jo, Cheolmin Choi, Sanguk Park | 2020-09-01 |