Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776826 | Apparatus and method for treating substrate | Junho Kim, Kyungsik SHIN, Jinki Shin, Man Kyu Kang, Yoonki SA | 2023-10-03 |
| 11524315 | Support unit, substrate treating apparatus including the same, and substrate treating method using the substrate treating apparatus | Jaeoh BANG, Kyungjin SEO | 2022-12-13 |