Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429042 | Torsion pump and chemical liquid supply unit | Young Jun SON, Young Un YUN, Woo-Ram Lee, Sung Chul Jung, Woo Sin JUNG +1 more | 2025-09-30 |
| 12366239 | Pump, apparatus for supplying chemical liquid and apparatus for processing substrate | Young Jun SON, Woo Sin JUNG, Woo-Ram Lee, Sung Chul Jung | 2025-07-22 |
| 12331736 | Pump, chemical liquid supplying unit, and substrate treating apparatus | Young Jun SON, Sung Chul Jung, Woo Sin JUNG, Young Un YUN, Woo-Ram Lee +1 more | 2025-06-17 |
| 12230510 | Substrate treating apparatus and method for the same | Jin Ho Choi | 2025-02-18 |
| 12228861 | Apparatus for treating substrate | Ki Sang EUM, Jin Ho Choi, Sun Wook JUNG, Hee Man AHN, Si Eun Kim | 2025-02-18 |
| 12140868 | Substrate treating apparatus with exhaust airflow guide | Sun Wook JUNG, Ki Sang EUM, Jin Ho Choi, Hee Man AHN | 2024-11-12 |
| 12125717 | Apparatus for treating substrate | Ki Sang EUM, Jin Ho Choi, Seung Han Lee, Sun Wook JUNG, Si Eun Kim | 2024-10-22 |
| 11710654 | Substrate transport apparatus, substrate processing apparatus, and substrate transport method | Ki Won Han | 2023-07-25 |