Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429042 | Torsion pump and chemical liquid supply unit | Young Jun SON, Byoung Doo CHOI, Young Un YUN, Woo-Ram Lee, Sung Chul Jung +1 more | 2025-09-30 |
| 12366239 | Pump, apparatus for supplying chemical liquid and apparatus for processing substrate | Young Jun SON, Woo-Ram Lee, Byoung Doo CHOI, Sung Chul Jung | 2025-07-22 |
| 12331736 | Pump, chemical liquid supplying unit, and substrate treating apparatus | Young Jun SON, Byoung Doo CHOI, Sung Chul Jung, Young Un YUN, Woo-Ram Lee +1 more | 2025-06-17 |
| 11845090 | Nozzle apparatus, apparatus and method for treating substrate | Chang Suk OH, UnKyu KANG | 2023-12-19 |
| 11752530 | Fluid discharging device, substrate processing system including same, and fluid discharging method thereof | Sang Eun NOH, Dae Sung Kim | 2023-09-12 |