Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12331399 | Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid | Ju Won Kim, Hee Man AHN, Jun Ho Seo, Dong Woon PARK, Sang Pil Yoon | 2025-06-17 |
| 11782348 | Apparatus for treating substrate | Ki Sang EUM, Gyeong Won SONG, Kyung Jin Seo | 2023-10-10 |
| 11656557 | Apparatus for treating substrate | Ki Sang EUM, Jung Yul Lee, Sun Wook JUNG | 2023-05-23 |