Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553438 | Semiconductor device and method for fabricating the same | Sang Jin Kim, Dong Woon PARK, Joon-soo Park, Chang-Jae Yang, Kwang-Sub Yoon +1 more | 2020-02-04 |
| 10168627 | Exposure apparatus and method for cleaning the same | Sungjoo Kim, Jinhong Park, Dohyun Seo, HyunHoon Lee | 2019-01-01 |
| 7932019 | Gettering members, methods of forming the same, and methods of performing immersion lithography using the same | Jin Young Yoon, Hyun-Woo Kim, Chan-Soo Hwang | 2011-04-26 |