Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927720 | Substrate target for in-situ lithography metrology, metrology method for in-situ lithography, and method of manufacturing integrated circuit device by using in-situ metrology | Gyu Min Jeong, Tae-hwa Jeong, Kwang-Sub Yoon | 2018-03-27 |
| 9557655 | Photomask including focus metrology mark, substrate target including focus monitor pattern, metrology method for lithography process, and method of manufacturing integrated circuit device | Yong Chul Kim, Young-Sik Park, Kwang-Sub Yoon | 2017-01-31 |