Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11713963 | Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method | Atsuko Shintani, Takahiro Kawasaki, Masami Ikota, Hiroki Kawada | 2023-08-01 |
| 11430106 | Image processing device, image processing method and charged particle microscope | Takeyoshi Ohashi, Atsuko Shintani, Masami Ikota | 2022-08-30 |
| 10854420 | Pattern evaluation device | Miki Isawa, Ayumi DOI | 2020-12-01 |
| 10724856 | Image analysis apparatus and charged particle beam apparatus | Atsuko Yamaguchi, Hitoshi Namai | 2020-07-28 |
| 10672119 | Inspection device | Atsuko Yamaguchi, Masami Ikota | 2020-06-02 |
| 10295339 | Pattern measurement method and measurement apparatus | Masami Ikota | 2019-05-21 |
| 9831062 | Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device | Makoto Suzuki, Satoru Yamaguchi, Kei Sakai, Miki Isawa, Satoshi Takada +1 more | 2017-11-28 |
| 8670115 | Inspection method and inspection apparatus | Yuji Miyoshi | 2014-03-11 |
| 8595666 | Semiconductor defect classifying method, semiconductor defect classifying apparatus, and semiconductor defect classifying program | Koichi Hayakawa, Takehiro Hirai, Yutaka Tandai, Tamao Ishikawa, Tsunehiro Sakai +3 more | 2013-11-26 |
| 6087924 | Gas sensors and methods of manufacturing the same | Kentaro Nagano, Hideyuki Horiuchi, Osamu Okada | 2000-07-11 |
| 5618496 | Gas sensors and their manufacturing methods | Kentaro Nagano, Shuuichi Kamiyama, Hiroaki Yanagida, Osamu Okada | 1997-04-08 |
| 4470396 | Internal combustion engine control system with means for reshaping of command from driver's foot pedal | Takashi Ishida | 1984-09-11 |