| 9378722 |
Lithographic apparatus with actuator to compensate acoustic vibration |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos +5 more |
2016-06-28 |
| 8743344 |
Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object |
Hans Butler, Martinus Van Duijnhoven, Johan Geerke, Cornelius Adrianus Lambertus De Hoon |
2014-06-03 |
| 8553199 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis +1 more |
2013-10-08 |
| 8245824 |
Combination of structure and an active damping system, and a lithographic apparatus |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker |
2012-08-21 |
| 8243258 |
Lithographic apparatus having acoustic resonator |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis +1 more |
2012-08-14 |
| 8164737 |
Lithographic apparatus having an active damping subassembly |
Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker |
2012-04-24 |
| 8059259 |
Damping arrangement, active damping system, lithographic apparatus, and projection assembly |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker |
2011-11-15 |
| 7538273 |
Cable connection to decrease the passing on of vibrations from a first object to a second object |
Hans Butler, Martinus Van Duijnhoven, Johan Geerke, Cornelius Adrianus Lambertus De Hoon |
2009-05-26 |
| 7170582 |
Support device and lightographic apparatus |
Hans Butler, Frank Auer, Martinus Van Duijnhoven, Pieter Johannes Gertrudis Meijers, Jan-Gerard Cornelis Van Der Toorn |
2007-01-30 |