Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085863 | Method for determining stochastic variation associated with desired pattern | — | 2024-09-10 |
| 11669019 | Method for determining stochastic variation associated with desired pattern | — | 2023-06-06 |
| 10234271 | Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector | Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev | 2019-03-19 |
| 10101676 | Spectroscopic beam profile overlay metrology | Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-10-16 |
| 10072921 | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element | Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-09-11 |
| 9739719 | Measurement systems having linked field and pupil signal detection | Noam Sapiens | 2017-08-22 |
| 7903250 | Control by sample reflectivity | Fabio A. Faccini, Torsten R. Kaack, Zhiming Jiang | 2011-03-08 |
| 7277172 | Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals | Daniel Kandel, Kenneth P. Gross, Michael Friedmann, Shakar Krishnan, Boris Golovanevsky | 2007-10-02 |