Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865472 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin Moore +3 more | 2018-01-09 |
| 9330926 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin McDonnell +3 more | 2016-05-03 |
| 9076634 | Replaceable upper chamber parts of plasma processing apparatus | Daniel Arthur Brown, Ian Kenworthy | 2015-07-07 |
| 8524099 | Methods for accessing a process chamber using a dual zone gas injector with improved optical access | Leonard J. Sharpless, Harmeet Singh | 2013-09-03 |
| 7928366 | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access | Leonard J. Sharpless, Harmeet Singh | 2011-04-19 |
| 7201829 | Mask plate design | Bulent M. Basol, Cyprian Emeka Uzoh | 2007-04-10 |
| 6344105 | Techniques for improving etch rate uniformity | John Daugherty, Neil Benjamin, Vahid Vahedi, David Cooperberg, Alan J. Miller +1 more | 2002-02-05 |