Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7827930 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Arulkumar Shanmugasundram, Russell C. Ellwanger, Ramakrishna Cheboli, Timothy Weidman | 2010-11-09 |
| 7654221 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Arulkumar Shanmugasundram | 2010-02-02 |
| 7534298 | Apparatus and method of detecting the electroless deposition endpoint | Arulkumar Shanmugasundram, Manoocher Birang, Sergey Lopatin | 2009-05-19 |
| 7341633 | Apparatus for electroless deposition | Dmitry Lubomirsky, Arulkumar Shanmugasundram, Sergey Lopatin | 2008-03-11 |
| 7323058 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Arulkumar Shanmugasundram, Russell C. Ellwanger, Ramakrishna Cheboli | 2008-01-29 |
| 7311779 | Heating apparatus to heat wafers using water and plate with turbolators | Son T. Nguyen, Gary J. Rosen | 2007-12-25 |
| 7223308 | Apparatus to improve wafer temperature uniformity for face-up wet processing | Son T. Nguyen, Gary J. Rosen | 2007-05-29 |
| 7205233 | Method for forming CoWRe alloys by electroless deposition | Sergey Lopatin, Arulkumar Shanmugasundram, Dmitry Lubomirsky | 2007-04-17 |
| 7138014 | Electroless deposition apparatus | Joseph Stevens, Dmitry Lubomirsky, Donald Olgado, Howard Grunes, Yeuk-Fai Edwin Mok | 2006-11-21 |
| 6824612 | Electroless plating system | Joseph Stevens, Dmitry Lubomirsky, Donald Olgado, Howard Grunes, Yeuk-Fai Edwin Mok +1 more | 2004-11-30 |