Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10857649 | Method and apparatus for performing a polishing process in semiconductor fabrication | Bo-I Lee, Chi-Ming Yang, Chin-Hsiang Lin | 2020-12-08 |
| 9242342 | Manufacture and method of making the same | Bo-I Lee, Chi-Ming Yang, Chin-Hsiang Lin | 2016-01-26 |
| 9102033 | Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process | Keung Hui, Jin-Ning Sung, Yen-Di Tsen, Jong-I Mou | 2015-08-11 |
| 8673783 | Metal conductor chemical mechanical polish | Han-Hsin Kuo, Chi-Ming Yang, Shwang-Ming Jeng, Chin-Hsiang Lin | 2014-03-18 |
| 8277286 | Slurry dispenser for chemical mechanical polishing (CMP) apparatus and method | Kun-Ku Hung, Zin-Chang Wei, Chyi Shyuan Chern | 2012-10-02 |