Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Soichi Isobe, Koji Maeda, Kenji Shinkai, Hidetatsu Isokawa +5 more | 2023-01-03 |
| 11495475 | Method of cleaning a substrate | Koji Maeda, Hisajiro Nakano, Masayoshi Imai, Yoichi Shiokawa | 2022-11-08 |
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Kuniaki Yamaguchi, Koji Maeda, Tetsuya Yashima, Kenji Shinkai +5 more | 2020-06-23 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima, Hidetatsu Isokawa +6 more | 2020-02-25 |
| 10096492 | Substrate cleaning apparatus and polishing apparatus | Koji Maeda, Hisajiro Nakano | 2018-10-09 |
| 9842732 | Substrate cleaning apparatus and substrate cleaning method | Koji Maeda, Soichi Isobe, Hideaki Tanaka | 2017-12-12 |
| 9704728 | Substrate cleaning apparatus and substrate cleaning method | Koji Maeda, Soichi Isobe, Hideaki Tanaka | 2017-07-11 |
| 8298369 | Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid | Koji Maeda, Ryuichi Kosuge, Soichi Isobe, Toru Niwa | 2012-10-30 |
| 6508695 | Pure water reusing system | Mutsumi Tanikawa, Mitsunori Komatsu, Kiyotaka Kawashima, Katsuya Okumura | 2003-01-21 |
| 6358125 | Polishing liquid supply apparatus | Kiyotaka Kawashima, Mutsumi Tanikawa, Keiko Chono | 2002-03-19 |