Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211676 | Measurement system, measurement method, and plasma processing device | Ayuta Suzuki, Atsushi Kubo | 2025-01-28 |
| 9209010 | Substrate cleaning method and substrate cleaning device | Tsuyoshi Moriya, Masaki Narushima | 2015-12-08 |
| 8945313 | Vacuum exhaust method and a substrate processing apparatus therefor | Tsuyoshi Moriya, Nobuyuki Nagayama | 2015-02-03 |
| 8940638 | Substrate wiring method and semiconductor manufacturing device | Satohiko Hoshino, Masaki Narushima | 2015-01-27 |
| 8585831 | Substrate cleaning method | Tsuyoshi Moriya, Eiichi Nishimura, Shinichi Kawaguchi, Jun Yamawaku, Kunio Miyauchi | 2013-11-19 |
| 8475602 | Substrate cleaning method and apparatus | Tsuyoshi Moriya | 2013-07-02 |
| 7401988 | Substrate processing apparatus and substrate processing method | Takayuki Katano, Junichi Kitano, Yo Suzuki, Masami Yamashita, Toru Aoyama +2 more | 2008-07-22 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano, Takayuki Katano, Yo Suzuki +7 more | 2007-04-24 |
| 6875466 | Substrate processing method and substrate processing apparatus | Junichi Kitano | 2005-04-05 |
| 6617095 | Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern | Junichi Kitano, Keiko Hada, Yuko Ono, Takayuki Katano | 2003-09-09 |
| 6485203 | Substrate processing method and substrate processing apparatus | Takayuki Katano, Junichi Kitano, Yo Suzuki, Masami Yamashita, Toru Aoyama +2 more | 2002-11-26 |