Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9170246 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski +1 more | 2015-10-27 |
| 8603252 | Cleaning of semiconductor processing systems | James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop, Jeffrey W. Neuner +7 more | 2013-12-10 |
| 8555705 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski +1 more | 2013-10-15 |
| 8221532 | Nanoporous articles and methods of making same | J. Donald Carruthers, Brian Bobita | 2012-07-17 |
| 8109130 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Philip S. H. Chen, Jeffrey W. Neuner, James Welch, Michele Stawasz, Thomas H. Baum +3 more | 2012-02-07 |
| 7966879 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski +1 more | 2011-06-28 |
| 7862646 | Nanoporous articles and methods of making same | J. Donald Carruthers, Brian Bobita | 2011-01-04 |
| 7819981 | Methods for cleaning ion implanter components | James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop, Jeffrey W. Neuner +1 more | 2010-10-26 |
| 7475588 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Philip S. H. Chen, Jeffrey W. Neuner, James Welch, Michele Stawacz, Thomas H. Baum +3 more | 2009-01-13 |
| 7370511 | Gas sensor with attenuated drift characteristic | Ing-Shin Chen, Philip S. H. Chen, Jeffrey W. Neuner, James Welch, Bryan C. Hendrix | 2008-05-13 |
| 7296460 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Philip S. H. Chen, Jeffrey W. Neuner, James Welch, Michele Stawasz, Thomas H. Baum +3 more | 2007-11-20 |
| 7296458 | Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same | Philip S. H. Chen, Ing-Shin Chen, Jeffrey W. Neuner, James Welch | 2007-11-20 |
| 7228724 | Apparatus and process for sensing target gas species in semiconductor processing systems | Philip S. H. Chen, Ing-Shin Chen, Jeffrey W. Neuner, James Welch, Jeffrey F. Roeder | 2007-06-12 |
| 7080545 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Philip S. H. Chen, Jeffrey W. Neuner, James Welch, Michele Stawasz, Thomas H. Baum +3 more | 2006-07-25 |
| 6897960 | Optical hydrogen detector | Mackenzie King | 2005-05-24 |
| 6846424 | Plasma-assisted dry etching of noble metal-based materials | Thomas H. Baum, Phillip Chen, Peter C. Van Buskirk, Peter S. Kirlin | 2005-01-25 |
| 6709610 | Isotropic dry cleaning process for noble metal integrated circuit structures | Peter C. Van Buskirk, Peter S. Kirlin, Thomas H. Baum | 2004-03-23 |
| 6596236 | Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same | Thomas H. Baum | 2003-07-22 |
| 6265222 | Micro-machined thin film hydrogen gas sensor, and method of making and using the same | Gautam Bhandari | 2001-07-24 |
| 6254792 | Isotropic dry cleaning process for noble metal integrated circuit structures | Peter C. Van Buskirk, Peter C. Kirlin, Thomas H. Baum | 2001-07-03 |
| 6143191 | Method for etch fabrication of iridium-based electrode structures | Thomas H. Baum | 2000-11-07 |
| 5972430 | Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer | Steven M. Bilodeau, Peter C. Van Buskirk | 1999-10-26 |
| 4693505 | Robot gripper | — | 1987-09-15 |
| 4271370 | Double air gap printed circuit rotor | — | 1981-06-02 |