Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7170582 | Support device and lightographic apparatus | Hans Butler, Martinus Van Duijnhoven, Pieter Johannes Gertrudis Meijers, Jan-Gerard Cornelis Van Der Toorn, Joost De Pee | 2007-01-30 |
| 7084956 | Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device | Johannes Adrianus Antonius Theodorus Dams | 2006-08-01 |
| 6791664 | Lithographic apparatus, device manufacturing method, and device manufacturing thereby | Franciscus Andreas Cornelis Johannes Spanjers, Jan Holterman, Marinus P. Koster, Theodorus Jacobus Adrianus de Vries | 2004-09-14 |
| 6788386 | Lithographic apparatus and device manufacturing method | Hendrikus Herman Marie Cox, Marc Wilhelmus Maria Van Der Wijst, Bastiaan Stephanus Hendricus Jansen, Dominicus Jacobus Petrus Adrianus Franken | 2004-09-07 |
| 6473161 | Lithographic projection apparatus, supporting assembly and device manufacturing method | Martinus Agnes Willem Cuijpers, Robertus Nicodemus Jacobus Van Ballegoij | 2002-10-29 |
| 6373296 | Circuit configuration for driving a semiconductor switch | Wolfgang Horchler, Michael Lenz | 2002-04-16 |
| 6269014 | Half-bridge configuration | Rainald Sander, Chihao Xu, Josef-Matthias Gantioler | 2001-07-31 |
| 6144442 | Pneumatic support device with a controlled gas supply, and lithographic device provided with such a support device | Jacob J. 'T Mannetje | 2000-11-07 |