Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6144442 | Pneumatic support device with a controlled gas supply, and lithographic device provided with such a support device | Frank Auer | 2000-11-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6144442 | Pneumatic support device with a controlled gas supply, and lithographic device provided with such a support device | Frank Auer | 2000-11-07 |