Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7217924 | Holey mirror arrangement for dual-energy e-beam inspector | Marian Mankos | 2007-05-15 |
| 7164139 | Wien filter with reduced chromatic aberration | Gabor Toth, Douglas K. Masnaghetti, Jeffrey Keister | 2007-01-16 |
| 7141791 | Apparatus and method for E-beam dark field imaging | Douglas K. Masnaghetti, Gabor Toth, Jeffrey Keister | 2006-11-28 |
| 6620565 | Electron beam lithography apparatus focused through spherical aberration introduction | Victor Katsap, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2003-09-16 |
| 6441378 | Magnetic energy filter | Katsushige Tsuno, John Rouse | 2002-08-27 |
| 6440620 | Electron beam lithography focusing through spherical aberration introduction | Victor Katsap, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2002-08-27 |
| 6420714 | Electron beam imaging apparatus | Victor Katsap, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2002-07-16 |
| 5578821 | Electron beam inspection system and method | Dan Meisberger, Alan D. Brodie, Anil Desai, Dennis G. Emge, Zhong-Wei Chen +7 more | 1996-11-26 |
| 5502306 | Electron beam inspection system and method | Dan Meisburger, Alan D. Brodie, Curt H. Chadwick, Anil Desai, Hans-Peter Dohse +28 more | 1996-03-26 |